capacitivelycoupledplasma相关论文
A simple model is introduced to reconstruct ion energy distributions (IEDs) in capacitively coupled plasmas in Ar/O2,wit......
The plasma nonuniformity is study by using optical emission spectroscopy (OES) to measure the intensity profiles of Ar l......
Measurement of electron density in fluoro-based capacitively coupled plasma by using floating resona
Due to some challenges for the diagnosis of langmuir probe in reactive plasmas,microwave based probe techniques are now ......
Studies on the Spatial and Temporal Behaviors of the Electron Energy Distribution and Plasma Paramet
Spatial and temporal behaviors of the electron energy distributions (EEDFs) and the plasma parameters were experimentall......
Investigation on the thin films on aluminum surface deposited by CF4/Ar and CF4 /O2/Ar plasmas by us
The temporally resolved optical emission spectroscopy (OES) is measured in capacitively coupled CF4/Ar or CF4/O2/Ar plas......
The discharge characteristics of capacitively coupled argon plasmas driven by very high frequency discharge are studied.......
Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitivel
A one-dimensional self-consistent calculation model of capacitively coupled plasma (CCP) discharge and electromag-netic ......
A self-consistent two-dimensional(2D) collisionless fluid model is developed to simulate the effects of the low-frequenc......
